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Observation of UV Nanoimprint Lithography Process by Micro-Digitalholographic-PTV

[+] Author Affiliations
Jun Taniguchi, Shin-ichi Satake, Noriyuki Unno, Takahiro Kanai

Tokyo University of Science, Noda, Chiba, Japan

Paper No. InterPACK2009-89220, pp. 593-597; 5 pages
  • ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability
  • ASME 2009 InterPACK Conference, Volume 1
  • San Francisco, California, USA, July 19–23, 2009
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 978-0-7918-4359-8 | eISBN: 978-0-7918-3851-8
  • Copyright © 2009 by ASME


UV nanoimprint lithography (UV-NIL) is powerful tool of nano-fabrication. This process is simple and quickly pattern transfer method because of room temperature process. Now, in this process sometimes generates the errors about shortage of filling or volume shrinking by photo-curable process. Therefore, observation of UV photo-curable resin behaviors at curing process is important. To observe this phenomenon, micro digital-holographic particle-tracking velocimetry (micro-DHPTV) method was used. This measurement method has sub-micron three dimensional spatial resolutions and high time-resolution at Newton fluid. The UV photo-curable resin is low viscosity liquid and observation was carried out. In conclusion, curing process of UV photo-curable resin was observed by micro-DHPTV.

Copyright © 2009 by ASME



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