Full Content is available to subscribers

Subscribe/Learn More  >

Optical Methodology for Testing of Microsystems

[+] Author Affiliations
Ryszard J. Pryputniewicz, Ryan T. Marinis, Peter Hefti

Worcester Polytechnic Institute, Worcester, MA

Paper No. InterPACK2009-89223, pp. 267-276; 10 pages
  • ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability
  • ASME 2009 InterPACK Conference, Volume 1
  • San Francisco, California, USA, July 19–23, 2009
  • Conference Sponsors: Electronic and Photonic Packaging Division
  • ISBN: 978-0-7918-4359-8 | eISBN: 978-0-7918-3851-8
  • Copyright © 2009 by ASME


Advancing the emerging technologies of MEMS, especially relating to the applications, constitutes one of the most challenging tasks in today’s micromechanics. In addition to design, analysis, and fabrication capabilities, this task also requires advanced test methodologies for determination of functional characteristics of devices produced to enable verification of their operation as well as refinement and optimization of specific designs. The tools used can be categorized as analytical, computational, and experimental. Solutions using the tools from any one category alone do not usually provide all of the necessary information on MEMS and extensive merging, or hybridization, of the tools from different categories is used. One of the approaches employed in the development of micro-structures of contemporary interest, is based on a combined use of the analytical, computational, and experimental solutions (ACES) methodology. In this paper, applicability of the ACES methodology is illustrated by use of selected MEMS samples. The representative results presented in this paper indicate that the optical methodology is a viable tool for micro-scale measurements and, as such, it is particularly useful for development of MEMS, especially while considering MEMS reliability assessment. In fact, this methodology is being used in various manufacturing stages of MEMS for high-performance applications.

Copyright © 2009 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In