0

Full Content is available to subscribers

Subscribe/Learn More  >

Micro Accelerometer and Magnetoresistive (MR) Sensor Directly Fabricated on a Ceramic Substrate

[+] Author Affiliations
Seiji Aoyagi

Kansai University, Suita, Osaka, Japann

Masato Suzuki, Tomokazu Takahashi, Tsutomu Tajikawa, Ken-ichi Saitoh, Shoso Shingubara, Yasuhiko Arai

Kansai University, Suita, Osaka, Japan

Hiroyuki Tajiri, Yasuhiro Yoshikawa

Rohm Co., Ltd., Kyoto, Japan

Paper No. IPACK2011-52290, pp. 429-436; 8 pages
doi:10.1115/IPACK2011-52290
From:
  • ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems
  • ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, MEMS and NEMS: Volume 1
  • Portland, Oregon, USA, July 6–8, 2011
  • ISBN: 978-0-7918-4461-8
  • Copyright © 2011 by ASME

abstract

The concept of micro-electro-mechanical systems (MEMS) sensors directly fabricated on a ceramic substrate, which can be used for a package of end product, was proposed. As demonstrations of the sensors directly fabricated on a ceramic package, an accelerometer and a magnetoresistive (MR) sensor are focused on, and their fabrications on a ceramic substrate is investigated. The accelerometer utilizes a fringe capacitance formed in a ferroelectric material. For this sensor, in stead of a previously used bulk PZT plate, a screen-printed BaTiO3 (BTO) film on a ceramic alumina substrate was herein employed. An accelerometer using a BTO film was practically fabricated. The sensitivity of it was estimated as 0.1 pF/g, which is degraded a little compare with the previously developed accelerometer using a PZT plate; however, the order is the same. The magnetoresistive (MR) sensor can detect not only x- and y-axes magnetic field intensities but also z-axis one, where all fields are based on the sensor coordinate system. Namely, not only azimuth but also angle of elevation of the sensor can be detected from triaxis components of geomagnetic field. The principle is as follows: a permalloy (FeNi) plate is stood aside MR element. The plate distorts magnetic field and generates x- (or y-) component from originally z-directional field. So, the resistance of MR element changes in proportional to z-axis field intensity, provided that other axes intensities are kept constant.

Copyright © 2011 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In