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Design and Implementation of a Multiple-Beam Tuning-Fork Gyroscope

[+] Author Affiliations
Ren Wang, Peng Cheng, Fei Xie, Zhili Hao

Old Dominion University, Norfolk, VA

Darrin Young

University of Utah, Salt Lake City, UT

Paper No. IPACK2011-52074, pp. 387-393; 7 pages
doi:10.1115/IPACK2011-52074
From:
  • ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems
  • ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, MEMS and NEMS: Volume 1
  • Portland, Oregon, USA, July 6–8, 2011
  • ISBN: 978-0-7918-4461-8
  • Copyright © 2011 by ASME

abstract

This paper presents the design, fabrication, and experimental results of a multiple-beam tuning-fork gyroscope (MB-TFG). Based on a numerical model of thermoelastic damping, a multiple-beam tuning-fork structure is designed with high Quality factors (Qs) in its two operation modes. A simple mask that defines the device through trenches is employed to implement this MB-TFG design on silicon-on-insulator wafers. The highest measured Qs of the fabricated MB-TFGs in vacuum are 255,000 in the drive-mode and 103,000 in the sense-mode, at a frequency of 15.7kHz. Under a frequency difference of 4Hz between the two modes (operation frequency is 16.8kHz) and a drive-mode vibration amplitude of 3.0μm, the measured rate sensitivity is 80μVPP /°/s with an equivalent impedance of 2.5MΩ. The calculated overall rate resolution of this device is 0.377hr°/√Hz.

Copyright © 2011 by ASME
Topics: Design

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