0

Full Content is available to subscribers

Subscribe/Learn More  >

Drilling of Microholes on Silicon Wafer With Ultrasonic Workpiece Holder

[+] Author Affiliations
Chuan-Yu Tsui, Chia-Che Wu, Ming-Chyuan Lu, Chi-Feng Huang

National Chung Hsing University, Taichung, Taiwan

Paper No. DETC2008-50026, pp. 811-817; 7 pages
doi:10.1115/DETC2008-50026
From:
  • ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems
  • Brooklyn, New York, USA, August 3–6, 2008
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4328-4 | eISBN: 0-7918-3831-5
  • Copyright © 2008 by ASME

abstract

This paper presents a study to improve machining quality concerning the method of drilling ceramics and other hard and brittle materials such as silicon wafers. Instead of making the drill vibrate by the ultrasonic actuator, a new design of PZT-driving ultrasonic workpiece wafer holder is proposed to ensure the high quality, high efficiency and longer life for micro tools in drilling the silicon wafer. In this paper, ultrasonic workpiece holders are first designed by FEA and fabricated experimentally. Then, the ultrasonic holders is used for a series of experiments under different vibration conditions to examine the behavior of drilled hole accuracy, and edge chipping on the drilled hold surface. Also, the behavior of tool during ultrasonic vibration of holder is examined experimentally. The result demonstrates the ultrasonic workpiece holder could enhance the quality and efficiency for drilling silicon wafers.

Copyright © 2008 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In