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Topology Optimized Microgrippers for Nanomanipulation of Carbon Nanotubes

[+] Author Affiliations
Ozlem Sardan, Dirch H. Petersen, Ole Sigmund, Peter Bo̸ggild

Technical University of Denmark, Lyngby, Denmark

Volkmar Eichhorn, Sergej Fatikow

University of Oldenburg, Oldenburg, Germany

Paper No. DETC2008-49540, pp. 799-801; 3 pages
doi:10.1115/DETC2008-49540
From:
  • ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems
  • Brooklyn, New York, USA, August 3–6, 2008
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4328-4 | eISBN: 0-7918-3831-5
  • Copyright © 2008 by ASME

abstract

In this paper, we present the topology optimization procedure, fabrication and characterization results for electrothermally actuated polysilicon microgrippers for nanomanipulation purposes. In our previous work [1], we compared the performance of topology optimized actuator with the conventional three-beam electrothermal actuators [2] of the same size through finite-element simulations and experiments. Here, we further improve the topology optimized microgripper design and demonstrate the preliminary results of pick-and-place nanomanipulation experiments performed, where carbon nanotubes (CNTs) are transferred on four-point probes for electrical characterization.

Copyright © 2008 by ASME

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