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Nanopore Size Estimation Using Electrochemical Impedance Spectroscopy Analysis

[+] Author Affiliations
Gou-Jen Wang, Ming-Chun Chien

National Chung-Hsing University, Taichung, Taiwan

Paper No. DETC2008-49699, pp. 731-736; 6 pages
  • ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems
  • Brooklyn, New York, USA, August 3–6, 2008
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4328-4 | eISBN: 0-7918-3831-5
  • Copyright © 2008 by ASME


We present a simple and cost effective approach using electrochemical impedance spectroscopy (EIS) for accurate pore size estimation of silicon based nano-pores. This method accounts for the capacitor effects of the electrical double layer and the resistor effects of the ion concentration inside the nano-channel. The nano-pore impedance was modeled as the electrolyte charge transfer resistance Rs in a series connection with a parallel ion diffusion circuit Rf with a constant phase element (CPE) that models the behaviour of the double layer. The EIS analysis that has been widely employed to measure the energy storage and dissipation properties of a physicochemical system in frequency domain was adopted to sense the impedance parameters of the nano-pore. The nano-pore size was then estimated based on the impedance parameters. The accuracy of the estimated nano-pore size was verified by the TEM image.

Copyright © 2008 by ASME



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