0

Full Content is available to subscribers

Subscribe/Learn More  >

Stitching Technology Using Hybrid Actuators in Nano Imprint

[+] Author Affiliations
Cheng-Hung Chen, Jia-Yush Yen, Lien-Sheng Chen

National Taiwan University, Taipei, Taiwan, R.O.C.

Shuo-Hung Chang

National Taiwan University, Taipei; Industrial Technology Research Institute, Taiwan, R.O.C.

Paper No. DETC2008-49260, pp. 683-687; 5 pages
doi:10.1115/DETC2008-49260
From:
  • ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems
  • Brooklyn, New York, USA, August 3–6, 2008
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4328-4 | eISBN: 0-7918-3831-5
  • Copyright © 2008 by ASME

abstract

With advancements in nanotechnology and the continuing reduction of the minimum feature size in integrated-circuit technologies, there is a need for next-generation lithography (NGL) tools. The direct transfer of grating structures stitched from interference lithography to a mold for nano imprinting offers a low-cost alternative for printing sub-100nm features with great potential accuracy, high resolution, and reductivity. This research presents dual stage laser-interferometer equipment to meet these requirements. In moving forward to the stitching of a small interference area, the most important issue is alignment. If the period of this interference fringe can be guaranteed, the stage can be moved in chronological alignment with the period. This paper also presents SEM results of stitching of a 600nm periodic structure.

Copyright © 2008 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In