0

Full Content is available to subscribers

Subscribe/Learn More  >

Modeling and Stability Analysis of Comb-Fingers in MEMS Electrostatic Actuators

[+] Author Affiliations
Yang-Che Chen, Ian Chao-Ming Chang, Rongshun Chen

National Tsing-Hua University, HsinChu, Taiwan

Max Ti-Kuang Hou

National United University, MiaoLi, Taiwan

Paper No. DETC2008-49731, pp. 641-646; 6 pages
doi:10.1115/DETC2008-49731
From:
  • ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems
  • Brooklyn, New York, USA, August 3–6, 2008
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4328-4 | eISBN: 0-7918-3831-5
  • Copyright © 2008 by ASME

abstract

This article presents a side electromechanical instability of slender comb-fingers in MEMS electrostatic devices. Two models are developed for predicting such side pull-in of comb-fingers; one is based in the lumped modeling technique and another is developed by FEM approach. In the slender finger array, the deflection of every finger and pull-in voltage can be calculated by the models. Results indicate every comb-finger bends with different amplitudes. In the finger array, few sided fingers are strongly deflected, the extreme sided fingers in particular, while other inner fingers show negligible deformations. We suggest these extreme sided fingers can dominate the side pull-in of the comb-fingers and should be considered with careful device design by employing the proposed models in this paper.

Copyright © 2008 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In