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Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

[+] Author Affiliations
Ozlem Sardan, Karin N. Andersen, A. Nicole MacDonald, Ole Sigmund, Peter Bo̸ggild, Andy Horsewell

Technical University of Denmark, Lyngby, Denmark

Paper No. DETC2008-49543, pp. 629-631; 3 pages
  • ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 20th International Conference on Design Theory and Methodology; Second International Conference on Micro- and Nanosystems
  • Brooklyn, New York, USA, August 3–6, 2008
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4328-4 | eISBN: 0-7918-3831-5
  • Copyright © 2008 by ASME


In this paper, we present the preliminary results of the modification of topology optimized polysilicon microgrippers by focused ion beam (FIB) milling. The main aim of the experiments we performed is to functionalize a faulty microgripper by separating the merged end-effectors with a sub-micron gap and reshaping them to achieve a smaller contact area with the manipulated object. However, the method proposed is also rather important for recovery of the dimensional accuracy or missing features during fabrication. Furthermore, it will enable realization of the inverse microgripper concept, which is not possible with conventional UV lithography.

Copyright © 2008 by ASME



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