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Displacement Amplifying Compliant Mechanisms for Two-Axis High-Resolution Monolithic Inertial Sensors

[+] Author Affiliations
M. Dinesh, G. K. Ananthasuresh

Indian Institute of Science, Bangalore, India

Paper No. DETC2008-49614, pp. 217-225; 9 pages
doi:10.1115/DETC2008-49614
From:
  • ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 2: 32nd Mechanisms and Robotics Conference, Parts A and B
  • Brooklyn, New York, USA, August 3–6, 2008
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4326-0 | eISBN: 0-7918-3831-5
  • Copyright © 2008 by ASME

abstract

Novel designs for two-axis, high-resolution, monolithic inertial sensors are presented in this paper. Monolithic, i.e., joint-less single-piece compliant designs are already common in micromachined inertial sensors such as accelerometers and gyroscopes. Here, compliant mechanisms are used not only to achieve de-coupling between motions along two orthogonal axes but also to amplify the displacements of the proof-mass. Sensitivity and resolution capabilities are enhanced because the amplified motion is used for sensing the measurand. A particular symmetric arrangement of displacement-amplifying compliant mechanisms (DaCMs) leads to de-coupled and amplified motion. An existing DaCM and a new topology-optimized DaCM are presented as a building block in the new arrangement. A spring-mass-lever model is presented as a lumped abstraction of the new arrangement. This model is useful for arriving at the optimal parameters of the DaCM and for performing system-level simulation. The new designs improved the performance by a factor of two or more.

Copyright © 2008 by ASME

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