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Nanostructuring Curved Surfaces Using a Flexible Stamp

[+] Author Affiliations
Bahador Farshchian, Sunggook Park

Louisiana State University, Baton Rouge, LA

JaeJong Lee

Korea Institute of Machinery & Materials, Daejeon, Republic of Korea

Paper No. ICNMM2009-82282, pp. 481-484; 4 pages
doi:10.1115/ICNMM2009-82282
From:
  • ASME 2009 7th International Conference on Nanochannels, Microchannels, and Minichannels
  • ASME 2009 7th International Conference on Nanochannels, Microchannels and Minichannels
  • Pohang, South Korea, June 22–24, 2009
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 978-0-7918-4349-9 | eISBN: 978-0-7918-3850-1
  • Copyright © 2009 by ASME

abstract

We report on a simple and effective process that allows direct imprinting of micro- and nanostructures on non-flat surfaces. A thin polydimethylsiloxane (PDMS) stamp having micro/nanogratings was placed between a metallic bar with a trapezoidal cross section or a metallic pellet and a flat polymethyl methacrylate (PMMA) substrate, followed by hot embossing at 200°C. During the hot embossing process, the metallic bar/pellet is pushed into the PMMA sheet forming a millimeter scale channel or a curved surface. Due to the presence of the PDMS stamp between the metallic object and the substrate, micro/nanostructures are produced into the channel or over the curved surface. With this method, we have successfully demonstrated micro- and nanostructures down to 300 nm wide gratings on non-flat substrates, as confirmed by scanning electron microscopy and atomic force microscopy. The process so developed will fill the gap in current micro- and nanofabrication technologies in that most of the technologies allow for patterning only on planar substrates.

Copyright © 2009 by ASME

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