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High Q Circular-Section Solenoid-Type Inductor

[+] Author Affiliations
Xiuhan Li

Beijing Jiaotong University; Peking University, Beijing, China

Guanghua Shu, Jinan Sao, Xiongwei Zhang

Beijing Jiaotong University, Beijing, China

Paper No. MicroNano2008-70139, pp. 745-749; 5 pages
doi:10.1115/MicroNano2008-70139
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

A* high Q-factor circular-section solenoid-type inductor is designed and fabricated through micro electro mechanical system (MEMS) technology. The radius of the circular-section is 100μm. Ansoft HFSS is used to design and optimize the structure parameters of the inductor. The stable inductance of 10nH and maximum Q-factor of 46 is gained at the N of 10, wire width w of 10μm, space between wires d of 15μm and the self-resonance frequency of the inductor is above 10GHz. A novel fabrication method—flip chip bonding is proposed to bond the two parts of the inductor, and the process is compatible with CMOS process.

Copyright © 2008 by ASME
Topics: Inductors , Solenoids

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