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Fabrication of Phase Reflection Sawtooth Gratings Optimized by Scalar and Vector Way by Using Diamond Cutting

[+] Author Affiliations
ChaBum Lee, TaeJun Kim, SunKyu Lee

Gwang-Ju Institute of Science and Technology, Gwang-Ju, South Korea

T. Kuriyagawa

Tohoku University, Sendai, Japan

Paper No. MicroNano2008-70266, pp. 703-704; 2 pages
doi:10.1115/MicroNano2008-70266
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

This paper presents optimization of phase reflection sawtooth gratings with a period of 2.0 μm and a depth of 0.2 μm based on the Fourier transformation (FT) and the rigorous coupled wave analysis (RCWA). And its fabrication on oxygen free Cu and electroless Ni-coated surfaces by using diamond cutting in a shaping process whose toolpath is interfered to provide smaller period. The diffraction efficiencies were estimated 100% for FT, 83.0% and 79.0% for TE and TM polarization of the incident light at a depth of 0.2 μm. It was found that electroless Ni-coated surface had better performance in terms of machining and optical functionality. From optical testing, the diffraction efficiencies were measured 84.0% and 84.4% for TE and TM polarization, respectively.

Copyright © 2008 by ASME

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