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Study on Precision Positioning System of Two-Dimensional Platform Based on High-Speed and Large-Range

[+] Author Affiliations
Chuan Yang, Zhi Zhang

Xi’an Jiaotong University, Xi’an, China

Paper No. MicroNano2008-70255, pp. 689-696; 8 pages
doi:10.1115/MicroNano2008-70255
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

A two-dimensional ultra-precision positioning system with high-speed and large-range which can be used for micro-nanometer machining has been studied out in this paper. Macro and micro moving system are used to meet the demands of ultra-precision positioning with high-speed and large-range. According to the demands of macro moving system, a valid control of fuzzy-neuron self-adaptive and weighted PID control algorithm with high speed and high precision is proposed. The experimental results show that the error of repeated positioning accuracy is less than 1 μ m for a random point within the range of 300mm by 300mm under the design load for a carrying test-bed with carrying area of 250mm by 250mm. According to the demands of micro moving system, self-adaptive and fuzzy reasoning PID control system based on neural network is studied for the first time. The experimental results show that repeated positioning accuracy is less than 100nm.

Copyright © 2008 by ASME

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