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The Effect of Duration of First and Second Anodization Steps on the Ordering of Nanopores in Anodic Aluminum Oxide Templates Achieved by Three Step Anodic Oxidation Process

[+] Author Affiliations
M. Abdollahzadeh, N. Parvaini-Ahmadi, F. Nasirpouri

Sahand University of Technology, Tabriz, Iran

Paper No. MicroNano2008-70224, pp. 683-687; 5 pages
doi:10.1115/MicroNano2008-70224
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

We report on the enhancement of naturally-occurred self ordering of nanopores in anodic aluminium oxide (AAO) membrane by performing three-step anodic oxidation process. Naturally-occurred self ordering of nanopores in anodic aluminium oxide (AAO) membrane has brought it into the applications of template for fabrication of nanoscale materials. Three-step anodic oxidation method was used to achieve self-ordering of nanopores. The effect of duration of first and second steps on the ordering of nanopores was investigated. The current-time curves recorded during anodization elucidate an almost same behavior for all three steps. Scanning electron micrographs (SEM) show hexagonally arranged 45 nm pores in a manner which contribute into the formation of highly ordered areas, called domains. Larger ones are clearly observed over the surface, for samples with longer first and second anodization steps.

Copyright © 2008 by ASME

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