0

Full Content is available to subscribers

Subscribe/Learn More  >

Failure Investigation and Analysis of Abnormal Capacitance of Accelerometer After ICP Release

[+] Author Affiliations
Ping An, Yandong He, Shitao Wang, Yanping Bai, Yilong Hao

Peking University, Beijing, China

Paper No. MicroNano2008-70201, pp. 677-681; 5 pages
doi:10.1115/MicroNano2008-70201
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

An abnormal capacitance case of capacitive accelerometer after inductive coupled plasma (ICP) release was investigated to solve the failure problem. scanning electron microscopy (SEM)/transmission electron microscopy (TEM), energy dispersive x-ray spectroscopy (EDX), X-Ray transmission inspection, epoxy resin filling/polishing were used to identify the possible root cause. Failure analysis results confirmed that abnormal capacitance occurred by some connecting combs. Based on the results of three ways to analysis, it was concluded that the abnormal capacitance was not due to the contamination between combs of accelerometer and the substrate, but due to the connection between some combs caused by the ICP etching ununiformity. The static capacitance and resistance test results also testified this conclusion.

Copyright © 2008 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In