0

Full Content is available to subscribers

Subscribe/Learn More  >

Fabrication of Nanoscale Vias by Offset Patterning

[+] Author Affiliations
Chi Ho Lau, S. W. Ricky Lee

Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China

Paper No. MicroNano2008-70131, pp. 615-618; 4 pages
doi:10.1115/MicroNano2008-70131
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

Patterning of features with photolithography technique by overlying multiple exposure patterns with intentional offset reduces the effective size of the resultant opening when the openings overlap incompletely. The size of resultant opening depends on the size of the parental opening and the degree of overlap. Overlapping via patterns helps to achieve small via size from photolithography. In the present study, two oxide layers with via pattern were involved. The bottom oxide layer was deposited and patterned first. The top oxide layer and the poly-Si sandwich layer were then deposited on the patterned bottom oxide layer and patterned with an offset afterwards. Experimental results show resultant vias with size reduction by more than 50% compared with the parental vias. The equivalent diameter of the resultant vias goes down to as small as 400 nm. It was found that the equivalent diameter decreases with reduction in parental via size. The length-to-width ratio of the resultant vias opening increases as the parental via size becomes larger. The offset distance is also found to contribute significant effect to the size of the resultant via. The large offset distance leads to small but high-aspect ratio resultant vias.

Copyright © 2008 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In