Full Content is available to subscribers

Subscribe/Learn More  >

Fabrication of a Novel Resonant Pressure Sensor Based on SOI Wafer

[+] Author Affiliations
Zhibo Ma, Sen Ren, Dayong Qiao, Weizheng Yuan

Northwestern Polytechnical University, Xi’an, China

Paper No. MicroNano2008-70079, pp. 593-596; 4 pages
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME


Based on the silicon-on-insulator (SOI) silicon, a novel resonant pressure sensor for atmosphere pressure detection is designed and fabricated. The resonator suspended by four beams at four pedestals on the diaphragm is encapsulated between two glass lids. The diaphragm shape changes with the change of ambient gas pressure; thereby the resonator’s nature frequency also is changes. To prevent the undesired etching of resonator during the wet etching, a protective process using silicon nitride and silicon oxide is adopted. Experiments show that after wet etching 10 hours in tetramethyl ammonium hydroxide (TMAH) solution, the resonator is successfully released. This protection technology shows a high practical value especially for the release of a movable microstructure by wet silicon etchants. Initial performance test results of the device yield a natural frequency of 9.932 KHz at atmospheric pressure and the Q-factor of 34 rising to over 7293 in high vacuum (<10 Pa). The relative pressure sensitivity of the sensor is measured to be 5.88% for a 10μm diaphragm.

Copyright © 2008 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In