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Fabrication of Al Micro-Coil and Loop by Utilizing Electromigration

[+] Author Affiliations
Yuxin Sun, Masumi Saka

Tohoku University, Sendai, Japan

Paper No. MicroNano2008-70073, pp. 589-592; 4 pages
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME


Aluminum micro-coil and micro-loop have been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form micro-fibers owing to crystallization. The fibers are rotated under the existence of the transverse force induced by the tilted holes during their growth, and the micro-coil and micro-loop are fabricated.

Copyright © 2008 by ASME



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