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High Sensitive Sensor for Micro and Nano Particles Detection Based on DeFET

[+] Author Affiliations
Mohamed F. Ibrahim, Fahmi Elsayed, Yehya H. Ghalab, Wael Badawy

University of Calgary, Calgary, AB, Canada

Paper No. MicroNano2008-70218, pp. 185-188; 4 pages
doi:10.1115/MicroNano2008-70218
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

This paper presents a new configuration of an electric field sensor, named “Differential Electric-Field Sensitive Field Effect Transistor” (DeFET). The new configuration which has different gate distances of DeFET is designed to detect tiny particles. The new design can be used in environmental applications such as one can detect carbon dioxide concentration in air. This paper also reviews the DeFET’s theory of operation and presents simulation which confirms the basic idea of the DeFET.

Copyright © 2008 by ASME

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