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Design and Simulation of Piezoelectric Micro-Cantilever Ultrasonic Transducers for Audio Directional Loudspeakers

[+] Author Affiliations
Teng Ma, Limei Xu

University of Electronic Science and Technology of China, Chengdu, Sichuan, China

Chenguang Cai, Leon Xu, Xia Wang, Jian Ma

Nokia Research Center, Beijing, China

Chuankai Qiu

Chinese Academy of Sciences, Chengdu, Sichuan, China

Paper No. MicroNano2008-70135, pp. 143-148; 6 pages
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME


This paper presents a piezoelectric multilayered microcantilever structure as a micro-electro-mechanical system (MEMS) transducer. The proposed micro-transducer is designed for novel audio directional loudspeaker for mobile communication devices. To obtain optimum design parameters and predict the cantilever performance before actual fabrication, the mechanical and electro-mechanical performance was simulated by the finite element method and further validated with theoretical calculation. Finally the fabrication process steps are proposed.

Copyright © 2008 by ASME



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