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The Study on Position Accuracy of Micro-Coordinate Measuring Machine

[+] Author Affiliations
Chuan Yang, Qiang Zhao, Yu-Long Zhao, Wei-Xuan Jing

Xi’an Jiaotong University, Xi’an, China

Paper No. MicroNano2008-70242, pp. 97-103; 7 pages
doi:10.1115/MicroNano2008-70242
From:
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME

abstract

In order to measure the microcosmic profiles of ultra-smooth surfaces, a high-accuracy noncontact micro-Coordinate Measuring Machine (micro-Coordinate Measuring Machine, micro-CMM) is developed in this paper. The working table of this measurement device is located by a macro-micro dual-drive system. A closed-loop control system, which is composed by a laser interferometer and stepper motors, is adopted to improve the positioning accuracy of the macro-positioning stage. The experimental results show that the positioning accuracy of this system is obviously improved and satisfies the positioning requirement of the macro-positioning stage. Because the positioning accuracy of the flexure-based micro-positioning stage can not satisfy the design requirement under the control of the traditional PID control, A PID control system based on Adaptive Neural-Fuzzy Inference is proposed to improve the control accuracy of the micro-positioning stage. The experimental results show that this system can improve the positioning accuracy of the micro-positioning stage, and basically meets the requirement of the design.

Copyright © 2008 by ASME
Topics: Machinery

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