Full Content is available to subscribers

Subscribe/Learn More  >

The Study on Position Accuracy of Micro-Coordinate Measuring Machine

[+] Author Affiliations
Chuan Yang, Qiang Zhao, Yu-Long Zhao, Wei-Xuan Jing

Xi’an Jiaotong University, Xi’an, China

Paper No. MicroNano2008-70242, pp. 97-103; 7 pages
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME


In order to measure the microcosmic profiles of ultra-smooth surfaces, a high-accuracy noncontact micro-Coordinate Measuring Machine (micro-Coordinate Measuring Machine, micro-CMM) is developed in this paper. The working table of this measurement device is located by a macro-micro dual-drive system. A closed-loop control system, which is composed by a laser interferometer and stepper motors, is adopted to improve the positioning accuracy of the macro-positioning stage. The experimental results show that the positioning accuracy of this system is obviously improved and satisfies the positioning requirement of the macro-positioning stage. Because the positioning accuracy of the flexure-based micro-positioning stage can not satisfy the design requirement under the control of the traditional PID control, A PID control system based on Adaptive Neural-Fuzzy Inference is proposed to improve the control accuracy of the micro-positioning stage. The experimental results show that this system can improve the positioning accuracy of the micro-positioning stage, and basically meets the requirement of the design.

Copyright © 2008 by ASME
Topics: Machinery



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In