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PFPE Modified Silicon Nano-Textured Surfaces for Adhesion and Friction Reduction

[+] Author Affiliations
Ying Song, Hengyu Wang, Min Zou

University of Arkansas, Fayetteville, AR

Paper No. MicroNano2008-70144, pp. 65-67; 3 pages
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME


This paper reports a new technique of producing hydrophobic surfaces with WCA as high as 147°. This technique consists of first generating nano-textures on a silicon surface via aluminum-induced crystallization (AIC) of amorphous silicon (a-Si) and then applying perfluoropolyether (PFPE) on the nano-textured surface (NTS). The resulting PFPE-modified NTS showed significant improvement on both surface hydrophobicity and tribological performances compared to a PFPE-modified smooth silicon surface.

Copyright © 2008 by ASME
Topics: Friction , Silicon



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