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Leakage Current Influence on Microdevice Performance and Reliability

[+] Author Affiliations
Oren Lahav, Its’hak Yomtovian, Lior Kogut

Rafael-Advanced Defense System Ltd, Haifa, Israel

Paper No. MicroNano2008-70097, pp. 39-42; 4 pages
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
  • Clear Water Bay, Kowloon, Hong Kong, June 3–5, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4294-0 | eISBN: 0-7918-3819-6
  • Copyright © 2008 by ASME


Leakage currents in microdevices have a significant impact on their performance and reliability. In the case of a microgyro, leakage currents can cause erroneous measurements, strong dependency on environmental conditions, electrical coupling, performance degradation over time (drift), and even cause failure. The influence of leakage currents on microgyro performance and reliability has been studied in this paper.

Copyright © 2008 by ASME
Topics: Reliability , Leakage



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