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Analysis and Design of Thermal Double-Cantilever Bimorph Actuators for Rotating-Type Micromirrors

[+] Author Affiliations
DongHyun Kim, Kyung Su Oh, Seungho Park

Hongik University, Seoul, South Korea

Ohmyoung Kwon

Korea University, Seoul, South Korea

Young Ki Choi

Chung-Ang University, Seoul, South Korea

Joon Sik Lee

Seoul National University, Seoul, South Korea

Paper No. MNHT2008-52085, pp. 1063-1067; 5 pages
  • ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer
  • ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer, Parts A and B
  • Tainan, Taiwan, June 6–9, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4292-4 | eISBN: 0-7918-3813-7
  • Copyright © 2008 by ASME


This paper reports the design and simulation of thermal double-cantilever bimorph (TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 μm width and 100 μm length, TDCB actuators result in vertical displacement of 28 μm at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators.

Copyright © 2008 by ASME



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