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Quantitative Scanning Thermal Microscopy With Double Scan Technique

[+] Author Affiliations
Kyeongtae Kim, Seungpil Jaung, Jaehoon Chung, Jongbo Won, Ohmyoung Kwon

Korea University, Seoul, South Korea

Joon Sik Lee

Seoul National University, Seoul, South Korea

Seungho Park

Hongik University, Seoul, South Korea

Young Ki Choi

Chung-Ang University, Seoul, South Korea

Paper No. MNHT2008-52266, pp. 899-904; 6 pages
doi:10.1115/MNHT2008-52266
From:
  • ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer
  • ASME 2008 First International Conference on Micro/Nanoscale Heat Transfer, Parts A and B
  • Tainan, Taiwan, June 6–9, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4292-4 | eISBN: 0-7918-3813-7
  • Copyright © 2008 by ASME

abstract

Scanning Thermal Microscope (SThM) is known as a tool of the highest spatial resolution in measuring local temperature and thermophysical properties. However, despite the highest spatial resolution of SThM, its usefulness has been limited because of the difficulties related to the quantitative interpretation of the measured data. We suggest a double scan technique that can make an advantage of heat transfer through the tip-sample contact by subtraction of air conduction signal obtained from ‘lift mode’ scan. The thermal signal obtained by the new method is free from the influence of air conduction. This, in turn, allowed the quantitative profiling of the sample temperature.

Copyright © 2008 by ASME

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