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Measurement of DNA Hybridization by Nano-Deformation of Microcantilever in CMOS Biosensor

[+] Author Affiliations
S. M. Yang, T. I. Yin, C. Chang

National Cheng Kung University, Tainan, Taiwan, R.O.C.

Paper No. MN2008-47047, pp. 217-221; 5 pages
  • ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials International Conference
  • ASME 2008 2nd Multifunctional Nanocomposites and Nanomaterials
  • Sharm El Sheikh, Egypt, January 11–13, 2008
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4291-6 | eISBN: 1-7918-3814-5
  • Copyright © 2008 by ASME


A 1 cm × 1 cm biosensor chip for analyzing DNA hybridization is developed by CMOS process. The sensor chip has 6 measurement regions, each region with 3 pairs of parallel microcantilever of 125 × 60 × 0.75μm. The microcantilever is a 4-layer structure composed of an immobilized surface layer, a top insulation layer, an embedded piezoresistive layer, and a bottom insulation layer to measure the nano-deformation induced by the surface-assemble monolayer of alkanethiols on Au. By the Langmuir adsorption model, the estimated adsorption rate of the ssDNA is 0.005sec−1 . The design has intrinsic sensitivity needed in biochemical applications such as detecting nucleotide polymorphism and single base mutation to sequence DNA. The capability of in-situ, multipoint measurement promise many frontiers to be explored.

Copyright © 2008 by ASME



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