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A Numerical Simulation Study on the Effects of Crucible Rotation and Magnetic Fields in Growth of SiGe by the Travelling Heater Method

[+] Author Affiliations
Youhei Takagi, Atsuko Ishida

Shizuoka University, Hamamatsu, Shizuoka, Japan

Yasunori Okano

Osaka University, Toyonaka, Osaka, Japan

Sadik Dost

University of Victoria, Victoria, BC, Canada

Paper No. IHTC14-23025, pp. 927-933; 7 pages
doi:10.1115/IHTC14-23025
From:
  • 2010 14th International Heat Transfer Conference
  • 2010 14th International Heat Transfer Conference, Volume 2
  • Washington, DC, USA, August 8–13, 2010
  • Conference Sponsors: Heat Transfer Division
  • ISBN: 978-0-7918-4937-8 | eISBN: 978-0-7918-3879-2
  • Copyright © 2010 by ASME

abstract

A numerical simulation study was carried out to shed light on the effects of applied crucible rotation and static magnetic field during the THM (travelling heater method) growth of bulk SiGe single crystals. The simulation results show that the application of crucible rotation weakens the radial silicon concentration gradient due to the effect of centrifugal force. The effects of applied static magnetic field direction and strength on the concentration field in the melt were also studied. It was found that the simultaneous application of crucible rotation and static magnetic field is best to grow large crystals with uniform composition. An optimum combination of crucible rotation rates and applied magnetic field strengths is determined.

Copyright © 2010 by ASME

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