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NanoFIBrication of a Two-Dimensional Phononic Crystal in a Free Standing Membrane

[+] Author Affiliations
Drew Goettler, Mehmet Su, Zayd Leseman

University of New Mexico, Albuquerque, NM

Roy Olsson, III, Ihab El-Kady

Sandia National Laboratories, Albuquerque, NM

Paper No. IMECE2010-38960, pp. 383-387; 5 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 13: Sound, Vibration and Design
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4450-2
  • Copyright © 2010 by ASME


A two-dimensional phononic crystal (PnC) that can operate in the GHz range is created in a freestanding silicon substrate using NanoFIBrication (using a focused ion beam (FIB) to fabricate nanostructures). First, a simple cubic 6.75 × 6.75 μm array of vias with 150 nm spacing is generated. After patterning the vias, they are backfilled with void-free tungsten scatterers. Each via has a diameter of 48 nm. Numerical calculations predict this 2D PnC will generate a band gap near 22 GHz. A protective layer of chromium on top of the thin (100 nm) silicon membrane confines the surface damage to the chromium, which can be removed at a later time. Inspection of the underside of the membrane shows the vias flaring out at the exit, which we are dubbing the ‘trumpet effect’. The trumpet effect is explained by modeling the lateral damage in a freestanding membrane.

Copyright © 2010 by ASME



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