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Dynamic Performance of an Electromagnetically Actuated Valveless Micropump

[+] Author Affiliations
Thien X. Dinh, Yoshifumi Ogami

Ritsumeikan University, Kusatsu, Shiga, Japan

Paper No. IMECE2010-40440, pp. 645-649; 5 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME


The dynamic performance of a valveless electromagnetic micropump is studied by a fluid–diaphragm coupling model. The model includes fluid inertia and considers the electromagnetic action on the flexible diaphragm of the pump as a sinusoidal force. Fluid pressure acting on the diaphragm is obtained instantaneously with solving the coupling equation through a transient dynamic mesh simulation. This treatment avoids omitting the phase shift between pressure force and displacement of the diaphragm. Furthermore, the model removes almost empirical parameters. A MEMS prototype is fabricated and the measured backpressure attains to 2.5cmH2 O when using a 65mA sinusoidal driving current at frequency of 30Hz.

Copyright © 2010 by ASME
Topics: Micropumps



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