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Investigation of the Oscillatory Behavior of Electrostatically-Actuated Microbeams

[+] Author Affiliations
Mahdi Mojahedi, Mahdi Moghimi Zand, Mohammad Taghi Ahmadian

Sharif University of Technology, Tehran, Iran

Paper No. IMECE2010-39589, pp. 619-626; 8 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME


Vibrations of electrostatically-actuated microbeams are investigated. Effects of electrostatic actuation, axial stress and midplane stretching are considered in the model. Galerkin’s decomposition method is utilized to convert the governing nonlinear partial differential equation to a nonlinear ordinary differential equation. Homotopy perturbation method (i.e. a special and simpler case of homotopy analysis method) is utilized to find analytic expressions for natural frequencies of predeformed microbeam. Effects of increasing the voltage, midplane stretching, axial force and higher modes contribution on natural frequency are also studied. The anayltical results are in good agreement with the numerical results in the literature.

Copyright © 2010 by ASME
Topics: Microbeams



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