0

Full Content is available to subscribers

Subscribe/Learn More  >

Investigation of the Oscillatory Behavior of Electrostatically-Actuated Microbeams

[+] Author Affiliations
Mahdi Mojahedi, Mahdi Moghimi Zand, Mohammad Taghi Ahmadian

Sharif University of Technology, Tehran, Iran

Paper No. IMECE2010-39589, pp. 619-626; 8 pages
doi:10.1115/IMECE2010-39589
From:
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME

abstract

Vibrations of electrostatically-actuated microbeams are investigated. Effects of electrostatic actuation, axial stress and midplane stretching are considered in the model. Galerkin’s decomposition method is utilized to convert the governing nonlinear partial differential equation to a nonlinear ordinary differential equation. Homotopy perturbation method (i.e. a special and simpler case of homotopy analysis method) is utilized to find analytic expressions for natural frequencies of predeformed microbeam. Effects of increasing the voltage, midplane stretching, axial force and higher modes contribution on natural frequency are also studied. The anayltical results are in good agreement with the numerical results in the literature.

Copyright © 2010 by ASME
Topics: Microbeams

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In