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Prestressed Harmonic Simulation of Electrostatic Microresonator With Proper Orthogonal Decomposition

[+] Author Affiliations
David Binion, Xiaolin Chen

Washington State University Vancouver, Vancouver, WA

Paper No. IMECE2010-37754, pp. 513-520; 8 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME


Due to its ease of implementation, electrostatic operation is one of the most common actuation/sensing techniques for micro-electro-mechanical-systems (MEMS). One such MEMS device is an electrostatic microresonator which is used to generate or filter signals. MEMS resonators are operated by pre-stressing the structure with a large bias voltage and then applying a small magnitude harmonic voltage. Accurate simulation requires models that describe the dynamic frequency response while accounting for stress stiffening. Finite Element Analysis (FEA) has widely been used to obtain accurate simulations of MEMS devices, however, a dense FEA mesh may be required resulting in computationally demanding models. To improve the computational efficiency, Model Order Reduction methods have regularly been used. In particular, Proper Orthogonal Decomposition (POD) has witnessed an increase in MEMS simulation. In this paper, POD has been investigated and implemented to model the dynamic behavior of a microresonator. An FEM model of a microresonator beam structure was produced and POD was employed to simulate the pre-stressed frequency response of the device. A pre-stressed harmonic simulation was performed using a full FEM model for comparison. It was found that the reduced model and full model responses were well matched while the computational time was drastically reduced through the use of POD.

Copyright © 2010 by ASME



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