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Application of P-N Junction Actuators in the Design and Fabrication of Resonant Microdevices

[+] Author Affiliations
Amir Hossein Khoshaman, Behraad Bahreyni

Simon Fraser University, Surrey, BC, Canada

James Ransley

Xaar’s Acoustic Inkjet Technology, Cambridge, UK

Paper No. IMECE2010-40519, pp. 501-506; 6 pages
doi:10.1115/IMECE2010-40519
From:
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME

abstract

In this article an all-silicon resonator for integrated applications based on the recently developed p-n junction actuation method is developed. The advantages and disadvantages of using this method over other possible actuation techniques are fully illustrated. The theory of the equations governing the transduction mechanism is explained and our new simulation method is presented. The validity of this method is verified by simulation of our earlier work. The simulation results of our new work are presented as well and a fabrication method is given in order build the device.

Copyright © 2010 by ASME

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