Full Content is available to subscribers

Subscribe/Learn More  >

Piezoelectric Strain Measurement for Low Power Microsensor Applications

[+] Author Affiliations
Alborz Amini, Behraad Bahreyni

Simon Fraser University, Surrey, BC, Canada

Paper No. IMECE2010-40508, pp. 495-499; 5 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME


Many transducers use mechanical strain measurements as their sensing method. We are proposing a mechanical strain measurement technique based on a change in the electrical impedance and frequency response of a piezoelectric film in a certain frequency. This piezoelectric transducer can be fabricated on top of substrate for measuring surface stress. This technique is provided with analytical and numerical models. Coupled field finite element simulations in COMSOL and Coventorwareare employed to confirm the measurable alteration in electrical impedance of the film due to applied normal and transverse stress. Piezoelectric material impedance measurement can be a precise and low power method to sense minuscule strains in micromechanical structures. To the best of our knowledge, this is the first demonstration of this technique at micro-scales.

Copyright © 2010 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In