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Piezoelectric Strain Measurement for Low Power Microsensor Applications

[+] Author Affiliations
Alborz Amini, Behraad Bahreyni

Simon Fraser University, Surrey, BC, Canada

Paper No. IMECE2010-40508, pp. 495-499; 5 pages
doi:10.1115/IMECE2010-40508
From:
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME

abstract

Many transducers use mechanical strain measurements as their sensing method. We are proposing a mechanical strain measurement technique based on a change in the electrical impedance and frequency response of a piezoelectric film in a certain frequency. This piezoelectric transducer can be fabricated on top of substrate for measuring surface stress. This technique is provided with analytical and numerical models. Coupled field finite element simulations in COMSOL and Coventorwareare employed to confirm the measurable alteration in electrical impedance of the film due to applied normal and transverse stress. Piezoelectric material impedance measurement can be a precise and low power method to sense minuscule strains in micromechanical structures. To the best of our knowledge, this is the first demonstration of this technique at micro-scales.

Copyright © 2010 by ASME

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