0

Full Content is available to subscribers

Subscribe/Learn More  >

An Investigation on the Flexural Sensitivity and Resonant Frequency of an AFM With Sidewall and Top-Surface Probes

[+] Author Affiliations
M. H. Kahrobaiyan, M. T. Ahmadian, P. Haghighi

Sharif University of Technology, Tehran, Iran

A. Haghighi

Tehran University, Tehran, Iran

Paper No. IMECE2010-38177, pp. 419-427; 9 pages
doi:10.1115/IMECE2010-38177
From:
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME

abstract

The resonant frequencies and flexural sensitivities of an atomic force microscope (AFM) assembled cantilever probe which comprises a horizontal cantilever, a vertical extension and two tips located at the free ends of the cantilever and the extension are studied. This probe makes the AFM capable of simultaneous topography at top-surface and sidewalls of microstructures especially microgears which leads to a time-saving swift scanning process. In this work, the effects of the sample surface contact stiffness and the geometrical parameters such as the ratio of the vertical extension length to the horizontal cantilever length and the distance of the vertical extension from clamped end of the horizontal cantilever on the resonant frequencies and flexural sensitivities are assessed. These geometrical effects are illustrated in some figures. The results show that the low-order vibration modes are more sensitive for low values of the contact stiffness but the situation is reversed for high values.

Copyright © 2010 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In