0

Full Content is available to subscribers

Subscribe/Learn More  >

Fabrication of High Aspect Ratio Microcoils Using X-Ray Lithography

[+] Author Affiliations
Daiji Noda, Masaru Setomoto, Tadashi Hattori

University of Hyogo, Ako, Hyogo, Japan

Paper No. IMECE2010-40295, pp. 285-289; 5 pages
doi:10.1115/IMECE2010-40295
From:
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME

abstract

Recently, the demand of micro-fabrications such as micro-sensors, microcoils, micro-actuators etc is increasing. Actuators account for a large percentage and volume and weight of a product compared with other parts. Therefore, the progress in downsizing of actuators was required. In order to resolve these problems, the key technology to realizing micro-devices is micro-fabrication process. Particularly, it is essential to the technologies for processing high aspect ratio structures in the production of micro-parts. We have proposed a three-dimensional fabrication process using X-ray lithography technique, and fabricated spiral microcoils having coil lines of narrow pitch and high aspect ratio structures. We have fabricated spiral microcoils at a pitch of 60 μm, and aspect ratio of about 5 using X-ray lithography and narrow metallization techniques on acrylic pipe surface. In addition, we also estimated the suction force of electromagnetic actuators using these microcoils. Measurement results were relatively in good agreement with theoretical values using high aspect ratio microcoils. It is very expected that the high performance microcoils could be manufactured in spite of miniature size.

Copyright © 2010 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In