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Control of Vibration Amplitude, Frequency and Damping of an Electrostatically Actuated Microbeam Using Capacitive, Inductive and Resistive Elements

[+] Author Affiliations
Abdolreza Pasharavesh, A. Fallah, M. T. Ahmadian

Sharif University of Technology, Tehran, Iran

Y. Alizadeh Vaghasloo

Amirkabir University of Technology, Tehran, Iran

Paper No. IMECE2010-40130, pp. 263-270; 8 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro and Nano Systems
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4447-2
  • Copyright © 2010 by ASME


In this study vibration amplitude, frequency and damping of a microbeam is controlled using a RLC block containing a capacitor, resistor and inductor in series with the microbeam. Applying this method all of the considerable characteristics of the oscillatory system can be determined and controlled with no change in the geometrical and physical characteristics of the microbeam. Euler-Bernoulli assumptions are made for the microbeam and the electrical current through the microbeam is computed by considering the microbeam deflection and its voltage. Considering the RLC block, the voltage difference between the microbeam and the substrate is calculated. Two coupled nonlinear partial differential equations are obtained for the deflection and the voltage. The one parameter Galerkin method is employed to transform the equations of motion to a set of nonlinear coupled ordinary differential equations. Differential quadrature method (DQM) is implemented to solve the governing nonlinear ordinary differential equations. The effect of the controller parameters such as capacitance, resistance and inductance on the amplitude, frequency and damping is studied. Also the internal resonance between the electrical and mechanical parts of the system is studied. Results indicate using these elements, amplitude, frequency and damping can be controlled as desired by the user.

Copyright © 2010 by ASME



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