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Precision Control of Piezoelectric Actuators With an Inversion-Based Approach

[+] Author Affiliations
Hui-Ru Shih, Wilbur L. Walters

Jackson State University, Jackson, MS

Paper No. IMECE2010-37444, pp. 1067-1076; 10 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 8: Dynamic Systems and Control, Parts A and B
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4445-8
  • Copyright © 2010 by ASME


The emphasis in this study is on the compensation of the uncertainties associated with piezoelectric actuators for precise nanomanipulation. A cascade model for creep, hysteresis, and vibrational dynamics of the piezoelectric actuator is proposed. The procedure for identifying the model parameters by experimental data is introduced. The identified model is employed to develop an inverse-based feedforward compensator. This study presents a comprehensive analysis and evaluation of the proposed method. As a result, this proposed approach can lead to a software-compensated platform for precise nanomanipulation.

Copyright © 2010 by ASME



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