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Multi-Physics Modeling of an Electro-Thermally Actuated Micro-Cantilever for Scanning Probe Microscopy

[+] Author Affiliations
Thomas Sattel, Dennis Roeser

Ilmenau University of Technology, Ilmenau, Germany

Stefanie Gutschmidt

University of Canterbury, Christchurch, New Zealand

Paper No. IMECE2010-40602, pp. 1057-1065; 9 pages
doi:10.1115/IMECE2010-40602
From:
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 8: Dynamic Systems and Control, Parts A and B
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4445-8
  • Copyright © 2010 by ASME

abstract

This article presents the nonlinear equations of motion and analysis of a smart micro-cantilever which was designed and fabricated for AFM (atomic force microscopy) technology. The model is derived from the mechanical continuum expressions and includes thermo-visco-elastic damping as well as the localized atomic force interaction between the tip and sample surface, which in turn is deduced from the Lennard-Jones potential. The modal dynamical system obtained from the continuum model and by means of the Galerkin decomposition is then numerically analyzed. The analysis begins with the study of equilibria and natural frequencies under the influence of the selected parameters, such as the direct current and gap between tip and sample. This is complemented by a brief dynamical analysis of the system in selected parameter domains. The multi-physics micro-cantilever exists in real life and these first results of work in progress serve our intentions of systematically investigating the static and dynamic behavior of the same experimentally in the future.

Copyright © 2010 by ASME

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