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Near Three Half Natural Frequency Resonance of Electrostatically Actuated MEMS Resonators

[+] Author Affiliations
Dumitru I. Caruntu, Martin W. Knecht

University of Texas Pan American, Edinburg, TX

Paper No. IMECE2010-38004, pp. 965-970; 6 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 8: Dynamic Systems and Control, Parts A and B
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4445-8
  • Copyright © 2010 by ASME


This paper investigates electrostatically actuated micro resonators response near three half natural frequency. Electrostatic force including fringe effect and Casimir force are included in the model. These forces introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. Phase-amplitude relationship is obtained. Numerical results for electrostatically actuated uniform micro resonator sensors are provided.

Copyright © 2010 by ASME



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