Full Content is available to subscribers

Subscribe/Learn More  >

Nonlinear Dynamics of MEMS Arches

[+] Author Affiliations
Sami Alkharabsheh, Mohammad Younis

SUNY Binghamton, Binghamton, NY

Paper No. IMECE2010-38253, pp. 445-451; 7 pages
  • ASME 2010 International Mechanical Engineering Congress and Exposition
  • Volume 8: Dynamic Systems and Control, Parts A and B
  • Vancouver, British Columbia, Canada, November 12–18, 2010
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-4445-8
  • Copyright © 2010 by ASME


In this paper, the dynamic response of electrostatically actuated clamped-clamped arch microbeam is investigated when excited by a DC load superimposed to an AC harmonic load. The dynamic analysis is carried out using a Galerkin-based reduced order model along with a shooting technique to find periodic motions and analyzing its stability using a Floquet theory. Results are presented for the cases of primary and super harmonic resonances. We found several nonlinear dynamic phenomena due to the inherent nonlinear electrostatic force and geometric nonlinearity of the arch. These include frequency-amplitude dependence, jumps, tangent bifurcations, coexistence of solutions, and softening and hardening behaviors. The shooting technique showed high robustness in capturing both the stable and unstable states of the system. Hence, it helped clarify vague behaviors that were previously reported using longtime integration of the equations of motion.

Copyright © 2010 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In