0

Full Content is available to subscribers

Subscribe/Learn More  >

Development of an Adaptive System ID Method for Enabling Advanced E-Beam Sweep Pattern Design

[+] Author Affiliations
Emerson Speyerer, Michael Gevelber

Boston University, Boston, MA

Dennis Radgowski

Cyber Materials, LLC, Boston, MA

Paper No. DSCC2010-4225, pp. 309-316; 8 pages
doi:10.1115/DSCC2010-4225
From:
  • ASME 2010 Dynamic Systems and Control Conference
  • ASME 2010 Dynamic Systems and Control Conference, Volume 2
  • Cambridge, Massachusetts, USA, September 12–15, 2010
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-4418-2 | eISBN: 978-0-7918-3884-6
  • Copyright © 2010 by ASME

abstract

Electron beam (E-beam) vacuum deposition is extensively used for the production of precision optical coatings due to its ability to economically deposit a wide range of source materials. To manufacture superior optical devices, high precision optical coatings are required. One measure of the process capabilities is the accuracy and repeatability of each layer’s optical thickness. A major limitation to controlling optical thickness, especially for large-scale and multi-layer optics, is the variability in the vapor plume geometry due to non-uniform evaporation of the source material. For sublimating materials, like silica, variations in the size and direction of the vapor plume has been attributed to topography on the melt surface, which forms due to uneven source depletion caused by non-uniform heating. In this paper, an experimentally based adaptive system identification method is used to develop custom sweep patterns to control a complicated nonlinear system with both process and equipment nonlinearities.

Copyright © 2010 by ASME
Topics: Cathode rays , Design

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In