0

Full Content is available to subscribers

Subscribe/Learn More  >

Dynamics, Sensing, and Control of a Thin-Film Piezoelectric Vertical Micro-Stage

[+] Author Affiliations
Kenn Oldham, Xianke Lin, Zhen Qiu, Thomas Wang

University of Michigan, Ann Arbor, MI

Jeffrey S. Pulskamp, Ronald G. Polcawich

U.S. Army Research Laboratory, Adelphi, MD

Paper No. DSCC2010-4175, pp. 111-118; 8 pages
doi:10.1115/DSCC2010-4175
From:
  • ASME 2010 Dynamic Systems and Control Conference
  • ASME 2010 Dynamic Systems and Control Conference, Volume 2
  • Cambridge, Massachusetts, USA, September 12–15, 2010
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-4418-2 | eISBN: 978-0-7918-3884-6
  • Copyright © 2010 by ASME

abstract

A novel thin-film piezoelectric vertical actuator with integrated strain gage position sensor is described, with sensor performance in simulated sliding mode control examined. The actuator utilizes four bending-beam thin-film lead-zirconate-titanate (PZT) legs to generate net translational out-of-plane motion of almost 100 μm, with higher speed and lower voltages than most MEMS vertical actuators. In addition, a portion of the top platinum electrode on the piezoelectric thin-film is used to perform position sensing, and shown to have good sensitivity during experimental operation of the actuator. A dynamic model of the stage based on a hysteresis model derived to fit experimental piezoelectric strain coefficient behavior is presented, and used to predict stage performance during sliding mode control using the integrated strain gage.

Copyright © 2010 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In