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Dynamics, Sensing, and Control of a Thin-Film Piezoelectric Vertical Micro-Stage

[+] Author Affiliations
Kenn Oldham, Xianke Lin, Zhen Qiu, Thomas Wang

University of Michigan, Ann Arbor, MI

Jeffrey S. Pulskamp, Ronald G. Polcawich

U.S. Army Research Laboratory, Adelphi, MD

Paper No. DSCC2010-4175, pp. 111-118; 8 pages
  • ASME 2010 Dynamic Systems and Control Conference
  • ASME 2010 Dynamic Systems and Control Conference, Volume 2
  • Cambridge, Massachusetts, USA, September 12–15, 2010
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-4418-2 | eISBN: 978-0-7918-3884-6
  • Copyright © 2010 by ASME


A novel thin-film piezoelectric vertical actuator with integrated strain gage position sensor is described, with sensor performance in simulated sliding mode control examined. The actuator utilizes four bending-beam thin-film lead-zirconate-titanate (PZT) legs to generate net translational out-of-plane motion of almost 100 μm, with higher speed and lower voltages than most MEMS vertical actuators. In addition, a portion of the top platinum electrode on the piezoelectric thin-film is used to perform position sensing, and shown to have good sensitivity during experimental operation of the actuator. A dynamic model of the stage based on a hysteresis model derived to fit experimental piezoelectric strain coefficient behavior is presented, and used to predict stage performance during sliding mode control using the integrated strain gage.

Copyright © 2010 by ASME



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