0

Full Content is available to subscribers

Subscribe/Learn More  >

Wafer Scale Factories Using Assembled MEMS Robots

[+] Author Affiliations
Rakesh Murthy, Dan O. Popa

UT Arlington, Fort Worth, TX

Paper No. DETC2010-28948, pp. 851-856; 6 pages
doi:10.1115/DETC2010-28948
From:
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME

abstract

This paper presents recent research progress in the manufacturing of MEMS based robotic positioning technology. The goal is to configure a nanofactory consisting of multiple microrobots that combine high precision with high throughput along with other application-specific requirements such as strength, dexterity, and work volume. This requires design to satisfy part mobility and dexterous manipulation with high precision. The first microrobot called the Articulated Four Axes Microrobot (AFAM) is a 3D dexterous micromanipulator robot, and we describe nano indentation experiments using AFM tips mounted on the microrobot. By combining positioning data obtained using laser interferometers and SEM imaging of nano indentation data, precision metrics such as accuracy, repeatability and resolution of the AFAM robot are determined. Preliminary reliability findings are presented. The second robot type is the ARRIpede microcrawler, and we present recent progress in microrobot precision evaluation including motion resolution and repeatability. Using these two microrobots as basic positioning and manipulation units, a nanoassembly module concept for hybrid nano assembly applications is proposed. In this paper we present recent progress in fabricating, assembling and evaluating the basic microfactory modules.

Copyright © 2010 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In