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Stabilization of a Parallel-Plate Microactuator via Control Lyapunov Functions

[+] Author Affiliations
S. A. M. Lajimi, G. R. Heppler

University of Waterloo, Waterloo, ON, Canada

Paper No. DETC2010-28956, pp. 777-784; 8 pages
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME


This work aims at developing a new nonlinear control scheme based on control Lyapunov functions combined with backstepping to stabilize parallel-plate electrostatic MEMS actuators. Parallel-plate electrostatic MEMS actuators are not linearly controllable at the origin due to a strong non-linearity which comes from electrostatic forces. In the present study, a robust method is used to derive a new controller to thoroughly remove the instability region, and minimize the possibility of hitting the fixed electrode by the moveable plate. A large number of numerical simulations are performed to verify the analytical model. The resulting parallel-plate microactuator system shows no region of instability using the proposed controller. A comparison shows the robustness of the method in comparison with other solutions, and demonstrates a significant improvement in performance.

Copyright © 2010 by ASME



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