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Stochastic Analysis of a Nonlinear MEMS Force Sensor

[+] Author Affiliations
Pezhman A. Hassanpour, Patricia M. Nieva, Amir Khajepour

University of Waterloo, Waterloo, ON, Canada

Paper No. DETC2010-28899, pp. 621-629; 9 pages
doi:10.1115/DETC2010-28899
From:
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME

abstract

In this paper, a sensing technique, based on the detection of Hopf bifurcation in the dynamic of a micro-bridge, is proposed. The governing equations of motion are derived, which take into account the fringe and large deflection effects. Moreover, a stochastic analysis approach is proposed for investigating the reliability of the sensor readings. It has been demonstrated that sensitivity of more than 2mV/μN is achievable with this sensing technique.

Copyright © 2010 by ASME

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