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An Investigation on the Torsional Sensitivity and Resonant Frequency of an AFM With Sidewall and Top-Surface Probes

[+] Author Affiliations
M. H. Kahrobaiyan, M. T. Ahmadian, P. Haghighi

Sharif University of Technology, Tehran, Iran

A. Haghighi

Tehran University, Tehran, Iran

Paper No. DETC2010-28637, pp. 589-599; 11 pages
doi:10.1115/DETC2010-28637
From:
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME

abstract

The resonant frequencies and torsional sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever, a vertical extension and two tips located at the free ends of the cantilever and the extension which makes the AFM capable of simultaneous topography at top-surface and sidewalls of microstructures especially microgears which consequently leads to a time-saving swift scanning process. In this work, the effects of the sample surface contact stiffness and the geometrical parameters such as the ratio of the vertical extension length to the horizontal cantilever length and the distance of the vertical extension from clamped end of the horizontal cantilever on torsional resonant frequencies and sensitivities are assessed. These geometrical effects are illustrated in some figures. The results show that the low-order vibration modes are more sensitive for low values of the contact stiffness but the situation is reversed for high values.

Copyright © 2010 by ASME

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