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Kinematically Excited Large Angle Tilting Actuator

[+] Author Affiliations
Assaf Ya’akobovitz, Slava Krylov

Tel Aviv University, Tel Aviv, Israel

Paper No. DETC2010-28454, pp. 555-560; 6 pages
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME


We report on a novel architecture and operational principle of a large angle kinematically excited tilting micro actuator. The device transforms and amplifies small linear out-of-plane motion of a parallel-plate electrostatic transducer into a tilting motion of a plate. The device characterized by robust single layer architecture was fabricated using a silicon on insulator (SOI) wafer and common deep reactive ion etching (DRIE) based fabrication process. Experimental and model results collectively illustrate the feasibility and efficiency of the suggested actuation approach. The optical tilting angle of 37.5° was experimentally registered under relatively low actuation voltage of 100 V.

Copyright © 2010 by ASME



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