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Effect of Microbeam Electrical Resistivity on Vibration Frequency Shift of an Electrostatically Actuated Microbeam

[+] Author Affiliations
Abdolreza Pasharavesh, M. T. Ahmadian

Sharif University of Technology, Tehran, Iran

Y. Alizadeh Vaghasloo

Amirkabir University of Technology, Tehran, Iran

Paper No. DETC2010-28430, pp. 547-554; 8 pages
  • ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
  • Volume 4: 12th International Conference on Advanced Vehicle and Tire Technologies; 4th International Conference on Micro- and Nanosystems
  • Montreal, Quebec, Canada, August 15–18, 2010
  • Conference Sponsors: Design Engineering Division and Computers in Engineering Division
  • ISBN: 978-0-7918-4412-0 | eISBN: 978-0-7918-3881-5
  • Copyright © 2010 by ASME


Nonlinear vibration of a microbeam actuated by a suddenly applied voltage with considering the effect of voltage distribution on the beam due to electrical resistivity of beam is investigated. Homotopy perturbation method is implemented to solve the coupled nonlinear partial differential equations of motion. The vibration frequency variation and damping at various resistivities is studied. Considering resistivity, effect of applied voltage and beam length on the frequency shift and damping ratio is analyzed. Findings indicate there exists a jump in frequency shift and damping ratio at a critical resistivity. Variation of critical resistivity with respect to modulus of elasticity and beam density is also studied. Results show the jump in frequency shift and damping ratio can be controlled with proper selection of modulus of elasticity and density of beam.

Copyright © 2010 by ASME



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